Wake Forest University
the Nano and Quantum Technologies Laboratory
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NanoteQ Facilities Gateway
Facilities Notes
NQTL Facilities
The Nano/MicroFab facilities at NanoteQ include iline optical lithography, FIB and e-beam lithography, Packaging, Characterization, electron beam / sputter co-evaporation, plasma processing, PECVD, and much more.
The microscopy facility at NanoteQ supports HRTEM, Analytical TEM, CTEM, SPM, SEM, and Optical imaging/characterization.
NanoteQ's Surface Analysis system is a refurbished PHI 570 with RBD upgrades to bring it to modern standards. The UVH system has both XPS and Auger along with mapping functions to full surface mapping capabilities. Resolution is limited by the CMA analyzer, but the system is excellent for standard materials assessments.
The SoftLab at NanoteQ is designed for organic device work. It has a full suite of device fabrication equipment, gloveboxes, evaporators, thin film measurement, as well as printing systems, dip pen lithography and more
Low Temperature Lab
Low Temperatures and High Fields can be explored at NanoteQ. Currently there are 4 fridges: a dilution system, 12 mK (base) and 9T capabilities, a 250 mK 3He fridge with 12T, and a 2.4K dipper systems with STM. A second dipper offers 11 T and approximately 2.4K
The RTW Optics lab has an assortment of support equipment including optical metrology for solar and lighting systems, a nano manipulator for positioning nanoscale objects, and fast pulse laser spectroscopies.
The Raman Spectroscopy lab has two different Raman microscope systems: an Almga from ThermoFisher and a Jobin Yvon 6700
​The MBE lab is setup primarily for chalcogenide thin films. The system use Riber sources and a Kurt leaker deposition chamber with an attached characterization chamber.
Become a tool user at NanoteQ, these are the steps:
1. Request a - nanoteq.bookedscheduler - account. (carroldl@wfu.edu)
2. Provide proof of passing the University safety training for the Lab. (fisennsw@wfu.edu)
3. Complete user training for the tools you want to use. Your NanoteQ trainer will send certification
to the facilities manager and then the tool will be added to your NanoteQ.bookedscheduler account. To schedule a trainer (carroldl@wfu.edu)
4. Schedule the use of the tool online through the bookedscheduler app. Schedule technical
staff separately if they are needed. The scheduling app is:
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https://nanoteq.bookedscheduler.io/Web/index.php
(WARNING: the cleanroom allows a maximum of 2 users at a time in the ISO 5 section.)
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5. Use the tool, report irregularities or damage if any, clean your work space when finished.
6. Pay your bill. Billing is monthly.
95
W 32nd St.
WS | NC
The infrastructure at NanoteQ is supported by user fees. Charges for the use of the equipment go toward the maintenance of the equipment. User rates are calculated and updated yearly. They are based upon a 3 year average of our expenses for the facility and are typically much lower than the costs for similar capabilities locally. The specific formula used for estimates of our costs are available upon request.​
​Fees for 2026 ...
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Access fee for 2026 is $50/Hour
This includes all tools of the Cleanroom ​and Microscopy
facilities, Optics, Soft Materials, X-ray and Surface Analysis
Labs.
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Users must supply their consumables (some things are
available at the Lab - please check)
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Tech Support: $100/hour (inclusive)
Training on Tool: $100/hour (inclusive)
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Fee Cap: There is a cap in yearly total fees for any single entity
(research group, company, etc.)​​​ For more information contact (carroldl@wfu.edu)
Acknowledging NanoteQ
For publications, we request that you consider recognition of support from Wake Forest University NanoteQ, as well as individual staff contributions. This may be formatted as such:
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Acknowledgement: This work was made possible by NanoteQ, a research facility supported by the Provost's Office of Wake Forest University.
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We’d like to thank [Staff Member] for [Service or other contribution].