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NanoteQ
Nano/Micro - Fabrication Facility

RM98

Instrumentation

The Nano/Micro - Fabrication Facility at Wake Forest is also called Room 98 . This facility is purpose-designed for the fabrication of  semiconductor nano/micro-devices, MEMs/NEMs, micro-fluidics, etc. 

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RM98 - is a class 100/1000 (ISO 5/6) cleanroom designed by our in-house NanoFabrik development group. The work-space is two parts: ~1000 sq. ft. with a top return air plenum, 4 complete air-changes per minute, 24 oC +/- 2 oC, 35% humidity +/- 2 %, 1500 lux yellow lighting (Lithoprotect filtration), three particle monitoring stations, a dedicated gowning room (ISO 7). The suite of lithography capabilities ranges from e-beam lith. and FIB to i-line, 365 nm optical lithography and are contained in class 100 bays.​ An additional 500 sq. ft. (ISO 7) aux. lab is setup for metrology including ellipsometry, alpha stepper, etc.. A 2000 sq. ft. mechanical room supports the facility for a total of ~ 3500 sq. ft.

The Cleanroom

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1.  Access into the cleanroom requires training and a cleanroom account granted by the cleanroom manager. Each tool also requires training and clearance by the tool manager.

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2. Users reserve tools for each session. Users sign in for each session through the one-tap app which tells us who is in the facility. Current cleanroom status is displayed at the entrance to RM 98.

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3. The cleanroom is open Mon. - Fri. from 9 am to 4 pm. Senior cleanroom personnel designated as superusers, are allowed access outside of this time. 

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4. Equipment may only be used in the manner for which was designed.

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5. Report all damage or malfunctions as soon as it is noticed.

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6. All users must abide by the cleanroom guidelines.

Preparing for using cleanrooms: Videos and Reading 
 


Strict protocols must be maintained at all times within the cleanroom environment. This is done to maintain safety for the users and the cleanliness of the room. After training and clearance to use the cleanroom, users must attend one cleanroom users meeting per year to keep their certification to use the facility. These meetings are announced regularly both on this page, on the front page of the website, and through the cleanroom users contact list. They typically are short and informative. Wake Forest University and NanoteQ Laboratories reserve the right to refuse service/access to any user not in compliance with the guidelines.  For more info: Carroldl@wfu.edu
 

Access to the Cleanroom

News and Announcements

New NanoteQ Cleanroom

The New Cleanroom at NanoteQ is implementing a novel cross-flow filtration system that will replace the lower air-return plenum found in most cleanrooms. Computer simulations show that this new design will allow the NanoteQ workspace to operate at Class 100 (ISO 5). We will see!

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© 2025 by NanoteQ @ Wake.

 

Wake Forest University is a small, selective, research university located in Winston-Salem NC. It has  a long tradition of innovation in the biomedical and physical sciences.  NanoteQ is a unit of WFU serving as a university-wide  central facility for specialized equipment and capabilities. Images and data content of this website are the property of WFU and its affiliate colleges. NanoteQ @ Wake reserves editorial right of access to commentary on these pages. Opinions expressed are not those of the University and the site does not represent binding policy by the University.

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