Wake Forest University
Cleanroom
and integrated microfab facility

Environment

1.  1200 sq. ft. floorspace with turbulent air return plenum, sealed ceiling suspension, gowning room entrance, 

2.  1500 lux yellow lighting using Lithoprotect(TM) light filters,

3. Class 1000 / ISO 6 with two monitoring stations

4. Acid/Base hoods and multiple snorkel-points throughout.

5. The space is divided into organic-device and Si-lithographic areas.

Access

1.  Completion of training program

2.  Clearance by facilities management

3.  Full gowning and cleanroom hygiene

4.  5 person max.

Manuals for our tools are constantly being added or updated on this website. Updated processes are frequently introduced. Please check regularly

 

 

Organic Device Fabrication Cluster

Basic OLED, FIPEL, OPV, OFT capabilities in both small molecules and polymers with a wide range of contacts and stack structures. UV sealants

 

Dual compartment gloveboxes with thermal evaporator, testing stations, spinners, hot plates, scales, etc.

ITO/glass handling, cutting and processing tools.

Acid/Base fume hood system with organic solution processing capabilities.

Coaters: 

           spray coater 

           auto-dip coater 

           automated drawblade

  dedicated evaporative 

Lithography Fabrication Cluster

 

The micro/nano fab capabilities are based on monolithic UV 

lithography (~365 nm). Simple mask creation is possible however 3X3 chrome on quartz masks from third party suppliers are recommended. 

 

DIMATIX print system

Resist spinner

Vacuum oven

Tube oven

Developing stations (positive and negative relief)

Plasma Etcher (Anatech)

Ozone cleaner 

UV flood light box

Karl Suss MJB3 mask aligner

AC/DC magnetron sputtering system,

VSW e-beam evaporator

Edwards thermal evaporator

VSW thermal evaporator 

VSW Sputter cleaning/Ashing/RIE system

Packaging Tools

West Bond 7400A - 32 Wirebonder

8 and 16 pin packaging with UV cure epoxy

Film Metrology Tools 

 

Alpha Stepper /profilometer

Surface tensiometer

Ellipsometer

Metallographic/Fluorescence microscope

Probe station

The WFU Cleanroom Facility is an active research and teaching facility. Courses and Workshops on lithography, deposition, and metrological processes are held regularly, through the Nanotechnology Center. Check for listings and updates. All facility users must read and understand the training manual and watch the safety video provided here. Facility Managers determine access to the facilities.

Facility Manual
Safety Video