the Wake Forest University
Cleanroom and Integrated Microfabrication Facility
1200 sq. ft. of floorspace with turbulent air return plenum, sealed ceiling suspension, gowning room entrance,
1500 lux yellow lighting using Lithoprotect (TM) light filters,
Class 1000 / ISO 6 with two particle monitoring stations
Acid/Base wash stations.
Organics cluster and Inorganics cluster.
1. Completion of training program
2. Clearance by facilities management
3. Full gowning and cleanroom hygiene
4. 5 person max.
The WFU Cleanroom Facility is an active research and teaching facility. Courses and Workshops on lithography, deposition, and metrological processes are held regularly, through the Nanotechnology Center. Check for listings and updates. All facility users must read and understand the training manual and watch the safety video provided here. Facility Managers determine access to the facilities.
Manuals for our tools are constantly being added or updated on this website. Updated processes are frequently introduced. Please check regularly.
particles (or fewer) per cubic foot of air volume makes this the cleanest room at Wake Forest
publications have started here
Basic OLED, FIPEL, OPV, OFT capabilities in both small molecules and polymers with a wide range of contacts and stack structures. UV sealants
Dual compartment gloveboxes with thermal evaporator, testing stations, spinners, hot plates, scales, etc.
ITO/glass handling, cutting and processing tools.
Acid/Base fume hood system with organic solution processing capabilities.
The micro/nano fab capabilities are based on monolithic UV
lithography (~365 nm). Simple mask creation is possible however 3X3 chrome on quartz masks from third party suppliers are recommended.
DIMATIX print system
Developing stations (positive and negative relief)
Plasma Etcher (Anatech)
UV flood light box
Karl Suss MJB3 mask aligner
AC/DC magnetron sputtering system,
VSW e-beam evaporator
Edwards thermal evaporator
VSW thermal evaporator
VSW Sputter cleaning/Ashing/RIE system
cutting edge tools and instruments for use by researchers in the fabrication of monolithic devices and integrated circuits.