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NanoteQ
Integrated Microfabrication Facility

RM98

Instrumentation

Lithography Tools

 Build Structures

Post Process Tools  

Package and Protect

Film Metrology Tools 

Characterize Thin Films

The Integrated MicroFabrication Facility is also called Room 98 . At Wake Forest University this facility is designed for the basic construction of  semiconductor micro-devices, MEMs/NEMs, micro-fluidics, etc. 

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The Cleanroom - is a class 1000 (ISO 6) facility designed by the NanoteQ-Fabrik group. The work-space is two parts: ~1000 sq. ft. with a top return air plenum, 4 complete air-changes per minute, 24 oC +/- 2 oC, 35% humidity +/- 2 %, 1500 lux yellow lighting (Lithoprotect filtration), three particle monitoring stations, a dedicated gowning room (ISO 7) and a suite of lithography capabilities ranging from e-beam lith. and FIB to i-line, 365 nm optical lithography.​ Secondly, an additional 500 sq. ft. of (ISO 7) space is setup for metrology including ellipsometry, alpha steppers, and probe station. This is supported by a little over 2000 sq. ft. of mechanical room for a total facility of ~ 3500 sq. ft.

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1.  Access to the cleanroom facilities requires training, a cleanroom account, and finally clearance by the cleanroom manager. Each tool requires its own training and clearance to be used.

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2. Users must reserve tools for each session and sign in before each session. Sign in is done through the one-tap app. This along with current cleanroom status is found on the iPad mounted in the entrance to RM 98.

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3. The cleanroom is open Mon. - Fri. from 9 am to 4 pm. Only senior cleanroom personnel designated superusers are allowed access outside of this time. 

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4. Equipment may only be used in the manner for which was designed.

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5. Report all damage or malfunctions as soon as it is noticed.

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6. All users must abide by the cleanroom guidelines.

Training: Videos and Reading 



The training takes approximately 1 hour. After this you are ready for training on individual tools. You must schedule this training with the cleanroom manager. Carroldl@wfu.edu
 
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