Wake Forest University
WFU
Cleanroom
and Integrated Microfab Facility
The Environment
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1200 sq. ft. of floorspace with turbulent air return plenum, sealed ceiling suspension, gowning room entrance,
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1500 lux yellow lighting using Lithoprotect (TM) light filters,
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Class 1000 / ISO 6 with two particle monitoring stations
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Acid/Base wash stations.
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Organics cluster and Inorganics cluster.
Access
1. Completion of training program
2. Clearance by facilities management
3. Full gowning and cleanroom hygiene
4. 5 person max.
The WFU Cleanroom Facility is an active research and teaching facility. Courses and Workshops on lithography, deposition, and metrological processes are held regularly, through the Nanotechnology Center. Check for listings and updates. All facility users must read and understand the training manual and watch the safety video provided here. Facility Managers determine access to the facilities.
Manuals for our tools are constantly being added or updated on this website. Updated processes are frequently introduced. Please check regularly.
particles (or fewer) per cubic foot of air volume makes this the cleanest room at Wake Forest
10
400+
publications have started here
Organics Cluster
Basic OLED, FIPEL, OPV, OFT capabilities in both small molecules and polymers with a wide range of contacts and stack structures. UV sealants
Dual compartment gloveboxes with thermal evaporator, testing stations, spinners, hot plates, scales, etc.
ITO/glass handling, cutting and processing tools.
Acid/Base fume hood system with organic solution processing capabilities.
Coaters:
spray coater
auto-dip coater
automated drawblade
dedicated evaporative
Inorganics Cluster
The micro/nano fab capabilities are based on monolithic UV
lithography (~365 nm). Simple mask creation is possible however 3X3 chrome on quartz masks from third party suppliers are recommended.
DIMATIX print system
Resist spinner
Vacuum oven
Tube oven
Developing stations (positive and negative relief)
Plasma Etcher (Anatech)
Ozone cleaner
UV flood light box
Karl Suss MJB3 mask aligner
AC/DC magnetron sputtering system,
VSW e-beam evaporator
Edwards thermal evaporator
VSW thermal evaporator
VSW Sputter cleaning/Ashing/RIE system
Packaging Tools
West Bond 7400A - 32 Wirebonder
8 and 16 pin packaging with UV cure epoxy
Film Metrology Tools
Alpha Stepper /profilometer
Surface tensiometer
Ellipsometer
Metallographic/Fluorescence microscope
Probe station
35+
cutting edge tools and instruments for use by researchers in the fabrication of monolithic devices and integrated circuits.