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Integrated Microfabrication Facility



Organics Cluster

Build Organic Devices

Inorganics Cluster

 Build Inorganic Circuits

Packaging Tools  Package and Protect

Film Metrology Tools 

Characterize thin films

The Environment

  • 1200 sq. ft. of floorspace with turbulent air return plenum, sealed ceiling suspension, gowning room entrance, 

  • 1500 lux yellow lighting using Lithoprotect (TM) light filters,

  • Class 1000 / ISO 6 with two particle monitoring stations

  • Acid/Base wash stations.

  • Organics cluster and Inorganics cluster.


The WFU Cleanroom Facility is an active research and teaching facility. Courses and Workshops on lithography, deposition, and metrological processes are held regularly, through the Nanotechnology Center. Check for listings and updates. All facility users must read and understand the training manual and watch the safety video provided here. Facility Managers determine access to the facilities.

Training and Access

Gowning and basic cleanroom practice (vid)

Chemical Safety (vid)

Cleanroom Manual (pdf)

After this you are ready for training on individual tools. You must schedule this training with the cleanroom manager.
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