Hitachi 4700 SEM

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A Cold Field Emission Gun Scanning Electron Microscope (FEGSEM) of "below‑the‑lens" design capable of (manufacturer's claims) 1.5 nm resolution at 15 kV, 12 mm W.D.; and 2.5 nm resolution at 1 k, 2.5 mm W.D.  Magnification ranges from 30X to 500,000X.  Specimen tilt at 12 mm W.D. up to 45 degrees.  Electron source is a cold FE gun producing high brightness (~ 2 x 10^9 A / cm^2/sr) with little energy spread (0.2 - 0.3 eV).  The "below‑the‑lens" design and large sample chamber port permits samples as large as 100 mm diameter x 17 mm thick.  Oil-free vacuum systems pump column and sample exchange.  Available image modes include secondary and backscattered electron images.  There are two secondary electron detectors; one above the objective lens, the other below.  Digital images may be acquired in BMP, TIFF, or JPEG file formats at 640 x 480, 1280 x 960, or 1560 x 1920 pixels

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Features

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Hitachi Scanning Electron Microscope (Model S-4700 Type II)

Cold cathode field emission gun

Computer-controlled flashing, extraction and accelerating voltage

Anode heater

Mild flashing function

Accelerating voltage 500 V to 30 kV

Landing voltage 0.01-2 kV (with deceleration)

Magnification 20x to 1,000,000x (referenced to 4”× 5” photo)

SE resolution 0.8 nm (15 kV), 1.1 nm (1kV landing voltage)

 

Optical Modes:

Normal probe current- optimized for high resolution imaging

High probe current- increased beam current, without significant loss of resolution, for analytical techniques

Ultra-high resolution- optimized for short working distances

High resolution- optimized for long working distances

AZtecEnergy Standard Microanalysis System with X-MaxN 80 large area Analytical Silicon Drift Detector (Oxford Instruments)

Lower SED for standard topographic imaging

Upper through-the-Lens (TTL) SED for high resolution imaging, Top TTL SED, for high resolution imaging with adjustable high pass filter function, In-lens collection system for imaging of low and/or high angle Backscattered Electron (BSE) signals

SE/BSE signal selection and mixing for TTL detectors

YAG Backscattered Electron (BSE) detector

6” Diameter Specimen Exchange airlock

High Speed Beam Blanker (Scanservice Corporation- Model 891)