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the Wake Forest University - Nano and Quantum Technologies Laboratory
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Sample prep lab
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JEOL 6330F
Hitachi 4700 F
Hitachi 3000
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RHK VT SPM100
JEOL 5200 SPM
DI/Veeco 3100 SPM
PHI XPS
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Olympus Vanox DIC
Olympus Vanox Fluor.
Digital Instruments/Veeco Dimension 3100 SPM
scanning probe microscope
Atomic Force Microscopy (AFM) is a high resolution scanning probe microscope with resolution on the order of sub nanometer. The AFM consist of a cantilever with a sharp tip used to scan the surface of a sample.
Our Veeco Dimension 3100 AFM
Sample size 150 mm diameter 12 mm thick
Stage movement x-y 150 mm with 2 micron resolution
Video optics with zoom 150-675 micron viewing area
Piezo scan head range; 90 micron x-y and 6 micron in z
16 bits DAC giving sub nanometer resolution
Max 512 x 512 samples/image
Contact and tapping mode AFM
Conductive AFM
STM
Liquid cell
Microscope: DI 3100 SPM
​Service contractor: AFM Services
Manager: Carroll​
Location: ​ RM02 microscopy
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Getting Started
Dimension 3100
The Dimension 3100 is capable of that the Dimension 3000, however where the 3100 outperforms the 3000 is in its repeatability. The improved stage controller allows for superior repeatability by more accurately locating the desired scanning area of a sample.
Key Specifications:
Noise: <0.5 Å RMS in vertical (Z) dimension when used with an optional vibration isolation system. (75 dbc ambient white noise)
Microscope:
Lateral accuracy typically within 1%, Maximum 2%
Provides full 16-bit resolution on all axes for all scan sizes and offsets
Tip/Sample Viewing: 180 to 810 μm optical field of view
Motorized zoom and focus
2 μm (highest) resolution at smallest field of view
X-Y Stage: 100 mm by 120 mm inspectable area
2 μm linear positioning resolution
4 μm in the X-direction and 6 μm in the Y-direction for bidirectional repeatability
Sample Size: ≤ 200 mm diameter wafer with X-Y stage
12 mm thick (taller samples can be accommodated with customized chucks)
Power: 1800 W peak consumption
100, 120 or 220-240 V single phase
50 or 60 Hz
Recommended hardware for a optimal system:
Nanoscope IIIa, Windows 7
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