Wake Forest University
DI 3100 spm
Microscope: DI 3100 SPM
Service contractor: AFM Services
Manager: Carroll (carroldl@wfu.edu)
Location: suite 02 microscopy
Sample prep lab
DI/Veeco 3100 SPM
Digital Instruments/Veeco Dimension 3100 SPM
Atomic Force Microscopy (AFM) is a high resolution scanning probe microscope with resolution on the order of sub nanometer. The AFM consist of a cantilever with a sharp tip used to scan the surface of a sample.
Our Veeco Dimension 3100 AFM
Sample size 150 mm diameter 12 mm thick
Stage movement x-y 150 mm with 2 micron resolution
Video optics with zoom 150-675 micron viewing area
Piezo scan head range; 90 micron x-y and 6 micron in z
16 bits DAC giving sub nanometer resolution
Max 512 x 512 samples/image
Contact and tapping mode AFM
Conductive AFM
STM
Liquid cell
Key Specifications:
Noise: <0.5 Å RMS in vertical (Z) dimension when used with an optional vibration isolation system. (75 dbc ambient white noise)
Lateral accuracy typically within 1%, Maximum 2%
Provides full 16-bit resolution on all axes for all scan sizes and offsets
Tip/Sample Viewing: 180 to 810 μm optical field of view
Motorized zoom and focus
2 μm (highest) resolution at smallest field of view
X-Y Stage: 100 mm by 120 mm inspectable area
2 μm linear positioning resolution
4 μm in the X-direction and 6 μm in the Y-direction for bidirectional repeatability
Sample Size: ≤ 200 mm diameter wafer with X-Y stage
12 mm thick (taller samples can be accommodated with customized chucks)
Power: 1800 W peak consumption
100, 120 or 220-240 V single phase
50 or 60 Hz
Nanoscope IIIa, controller
Windows 11