Hitachi S-3000 N SEM

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​Technical Specifications

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Accelerating Voltage 0.3-30kV

Secondary electron image Resolution: 3.5nm (25kV, HV mode).

Backscattered electron image Resolution: 5.0nm (25kV, VP mode).

Magnification range: 15x ~ 300,000x.

Variable pressure range: 1-270Pa.>/li>

Maximum Specimen size: 150mm diameter x 20mm high

Specimen Tilt/ Rotation: 0-60 degrees, 360 degree rotation

Specimen movement: 100mm (x), 50mm. (Y), 5~40mm (Z)

Detectors: Secondary, Backscattered, Absorbed Current

XEDS position: 15mm working distance, 35degree take off.