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NanoteQ  
RM98aux Metrology Cluster 

RM98

Lithography

Packaging

Metrology

RM98aux is a clean space (ISO7) adjacent to Rm98 and used exclusively for thin film metrology and characterization. ISO 7 protocols are used in this room (lab coats, hair nets, etc.) and access to RM98 grants access to RM98aux.

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Alpha step stylus profilometer

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Ellipsometer 

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Optical Inspection microscopes 

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Probe station 

The microscopy suite is located across the hallway and provides microscopic evaluation of thin films from scanning probe microscopy to high resolution TEM

Schedule the cluster

(account required)

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© 2025 by NanoteQ @ Wake.

 

Wake Forest University is a small, selective, research university located in Winston-Salem NC. It has  a long tradition of innovation in the biomedical and physical sciences.  NanoteQ is a unit of WFU serving as a university-wide  central facility for specialized equipment and capabilities. Images and data content of this website are the property of WFU and its affiliate colleges. NanoteQ @ Wake reserves editorial right of access to commentary on these pages. Opinions expressed are not those of the University and the site does not represent binding policy by the University.

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