Wake Forest University

Cleanroom Resource Page #4: Metrology
Recommended processes, user practices, and other resources are found here for each tool in the Metrology cluster.

Profilometer
Status
Operational
Video
Manual
Process Suggestions

Ellipsometer
Status
Operational
Video
Manual
Process Suggestions

Optical microscopy
Status
Operational
Video
Manual
Process Suggestions

Probe station
Status
Operational
Video
Manual
Process Suggestions