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Cleanroom Resource Page #4: Metrology 

Recommended processes, user practices, and other resources are found here for each tool in the Metrology cluster.

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Profilometer

Status

Operational

Video
Manual
Process Suggestions
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Ellipsometer

Status

Operational

Video
Manual
Process Suggestions
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Optical microscopy

Status

Operational

Video
Manual
Process Suggestions
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Probe station

Status

Operational

Video
Manual
Process Suggestions