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Nanote
Nano/Micro - Fab. Tools 
 

RM98

Lithography

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Suss Mask Aligners

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Focussed Ion Beam: FIB 

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Nabity NPGS: e-beam lithography

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Resist Spinners

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DPN 2000 dip pen lithography system 

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Wet Benches

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Processing Ovens

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Mask design software

Deposition/Etching

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Thermal Evaporation

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AC/DC Sputtering 

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e Beam Evaporator

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PECVD system 

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Ar or O2 plasma etcher/asher 

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UV ozone cleaner 

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Reactive ion etcher (RIE) 

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© 2024 by NanoteQ @ Wake.

 

Wake Forest University is a small, selective, research university located in Winston-Salem NC. It has  a long tradition of innovation in the biomedical and physical sciences.  NanoteQ is a unit of WFU serving as a university-wide  central facility for specialized equipment and capabilities. Images and data content of this website are the property of WFU and its affiliate colleges. NanoteQ @ Wake reserves editorial right of access to commentary on these pages. Opinions expressed are not those of the University and the site does not represent binding policy by the University.

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