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NanoteQ
X-ray and Surface Analysis Lab

XPS

PHI 570 Scanning Auger and XPS system

X-Ray Photoelectron Spectroscopy (XPS / ESCA) and Auger Electron Spectroscopy (AES)

The NANOTEQ XPS/AUGER system is an older system that has been rebuilt and upgraded by RBD instruments in California. Further upgrades and modifications have been made by the NRC engineering team here at NANOTEQ. These upgrades include changes to the vacuum system, sample exchange, new X-ray systems, and Auger CCD alignment system, along with a new sputter system. The system is highly effective in a wide variety of surface analysis functions.

Instrumental resolution: 

 

Energy - 0.5 eV

2D elemental mapping - 100 microns

Base pressure - 2 x 10 (-11) torr

Excitation: Al K-alpha line Ex = 0.25 eV

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© 2026 by NanoteQ @ Wake.

 

Wake Forest University is a small research university located in Winston-Salem NC. It has  a long tradition of innovation in the biomedical and physical sciences.  NanoteQ is a unit of WFU serving as a university-wide  central facility for specialized equipment and capabilities. Images and data content of this website are the property of WFU and its affiliate colleges. NanoteQ @ Wake reserves editorial right of access to commentary on these pages. Opinions expressed are not those of the University and the site does not represent binding policy by the University.

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