Wake Forest University - the Nano and Quantum Technologies Laboratory

NanoteQ
X-ray and Surface Analysis Lab
XPS
PHI 570 Scanning Auger and XPS system
X-Ray Photoelectron Spectroscopy (XPS / ESCA) and Auger Electron Spectroscopy (AES)
The NANOTEQ XPS/AUGER system is an older system that has been rebuilt and upgraded by RBD instruments in California. Further upgrades and modifications have been made by the NRC engineering team here at NANOTEQ. These upgrades include changes to the vacuum system, sample exchange, new X-ray systems, and Auger CCD alignment system, along with a new sputter system. The system is highly effective in a wide variety of surface analysis functions.
Instrumental resolution:
Energy - 0.5 eV
2D elemental mapping - 100 microns
Base pressure - 2 x 10 (-11) torr
Excitation: Al K-alpha line Ex = 0.25 eV
