JEOL 6340F SEM

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In-lens secondary electron detector

Resolution: 2.5nm at 1kV 1.2nm at 20kV

Sample size: 4" X-Direction: 50 mm Y-Direction: 70 mm

Chamber: Airlock, 4" LN2 cold trap

EDX Capabilities Chamber camera & monitor X-Stream imaging system

Operating system: Windows XP Image capture & networking capability.

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Cost: Schedule A

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